GB/T 20175-2006
Surface chemical analysis.Sputter depth profiling.Optimization using layered systems as reference materials (English Version)
- Standard No.
- GB/T 20175-2006
- Language
- Chinese, Available in English version
- Release Date
- 2006
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Latest
- GB/T 20175-2006
- Scope
- In order to optimize the instrument settings of Auger Electron Spectroscopy, X-ray Photoelectron Spectroscopy and Secondary Ion Mass Spectrometry to achieve depth resolution, this standard uses appropriate single-layer and multi-layer film system reference materials to provide optimized sputtering depth analysis. A guide to parameters. The use of special multilayer systems (such as various doped layer systems) is not covered by this standard.
GB/T 20175-2006 history
- 2006 GB/T 20175-2006 Surface chemical analysis.Sputter depth profiling.Optimization using layered systems as reference materials
