GB/T 17864-1999
CD Metrology procedures (English Version)
- Standard No.
- GB/T 17864-1999
- Language
- Chinese, Available in English version
- Release Date
- 1999
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Latest
- GB/T 17864-1999
- Scope
- The purpose of this standard is to specify a uniform method for the metrology system to measure the accuracy of the CD pattern size in the photolithography process. This standard does not address how to use these metrology systems to solve problems, nor does it address changes in other influencing factors in the process, such as heat treatment of wafers, focus control of exposure machines, and materials. Metrology or measurement is fundamental in production activities. First rely on its monitoring to establish feasible production capacity, and then use it to check whether the product meets the specifications or design indicators. The parameter discussed in this standard is precision. Other important parameters such as reliability and linearity are covered in other standards. This standard describes how to determine the performance of metrology/measurement systems in the very specific application of photolithography in the manufacture of integrated circuit wafers. This standard is also applicable to the IC mask manufacturing process. At this time, the "big wafer" in the standard can be replaced with "mask". The finished IC wafer needs to be measured for electrical properties. But measurements in the middle of the lithography process help predict and control the performance of the final product. This standard applies to photolithography intermediate measurements and finished product measurements, but has nothing to do with the specific process technology used. Measurement results and system performance are dependent on the sample used. Therefore, the performance of different systems or the performance of the same system at different times can only be properly compared when measurements are made on a sample of the same material composition.
GB/T 17864-1999 history
- 1999 GB/T 17864-1999 CD Metrology procedures
