DIN 50441-4:1999
Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 4: Slice diameter, diamter variation, flat diameter, flat length, flat depth
- Standard No.
- DIN 50441-4:1999
- Release Date
- 1999
- Published By
- German Institute for Standardization
- Status
- Latest
- DIN 50441-4:1999
- Scope
- The methods according to the document cover the determination of the slice diameter, diameter variation, flat diameter, flat length and flat depth. They are nondestructive regarding mechanical damages.#,,#
DIN 50441-4:1999 history
- 1999 DIN 50441-4:1999 Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 4: Slice diameter, diamter variation, flat diameter, flat length, flat depth
