General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
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GB/T 16523-1996
Scope
This standard specifies the technical requirements and test methods for circular quartz glass photomask substrates. This standard applies to circular quartz glass photomask substrates.
GB/T 16523-1996 history
1996GB/T 16523-1996 Specification for round quartz photomask substrates