JIS H 0614:1996
Visual inspection for silicon wafers with specular surfaces

Standard No.

JIS H 0614:1996

Release Date

1996

Published By

Japanese Industrial Standards Committee (JISC)

Latest

JIS H 0614:1996

Scope

This standard specifies the visual inspection of the front surface (mirror surface and back surface) of silicon wafers for the purpose of forming semiconductor devices, which are mirror-finished using chemical-mechanical polishing (hereinafter referred to as wafers).

JIS H 0614:1996 history

• 1996 JIS H 0614:1996 Visual inspection for silicon wafers with specular surfaces