DIN 50452-3:1995
Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 3: Calibration of optical particle counters
- Standard No.
- DIN 50452-3:1995
- Release Date
- 1995
- Published By
- German Institute for Standardization
- Status
- Replace By
- DIN 50452-3:1995-10
- Latest
- DIN 50452-3:1995-10
- Scope
- The document describes methods for the determination of measuring deviations of particle sizes, particle concentrations and the resolving capacity of optical particle counters based upon measuring of the laser light-scattering.#,,#
DIN 50452-3:1995 history
- 1995 DIN 50452-3:1995-10 Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 3: Calibration of optical particle counters
- 1995 DIN 50452-3:1995 Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 3: Calibration of optical particle counters
