DIN 50441-3:1985
Testing of materials for semiconductor technology; measurement of the geometric dimensions of semiconductor slices; determination of flatness deviation of polished slices by means of the multiple beam interference

Standard No.

DIN 50441-3:1985

Release Date

1985

Published By

German Institute for Standardization

Status

Withdraw

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DIN 50441-3:1985

DIN 50441-3:1985 history

• 1985 DIN 50441-3:1985 Testing of materials for semiconductor technology; measurement of the geometric dimensions of semiconductor slices; determination of flatness deviation of polished slices by means of the multiple beam interference