This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation and storage requirements for 5% hydrogen/helium mixture. This document applies to 5% hydrogen/helium mixed gas (hereinafter referred to as 5% hydrogen/helium mixed gas) used in the electronics industry. Hydrogen-helium mixed gases with other component proportions can be implemented as a reference.
T/CHBAS 27-2022 history
2022T/CHBAS 27-2022 Mixed gas 5% hydrogen/helium for electronic industry