UNE-EN 62276:2016 Single crystal wafers for surface acoustic wave (SAW) device applications - Specifications and measuring methods (Endorsed by Asociación Española de Normalización in January of 2017.)
2017UNE-EN 62276:2016 Single crystal wafers for surface acoustic wave (SAW) device applications - Specifications and measuring methods (Endorsed by Asociación Española de Normalización in January of 2017.)