2015DIN EN 62047-20:2015-04 Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes (IEC 62047-20:2014); German version EN 62047-20:2014
2015DIN EN 62047-20:2015 Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes (IEC 62047-20:2014); German version EN 62047-20:2014
1970DIN EN 62047-20 E:2012-07 Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes