T/SHDSGY 135-2023
New Energy Semiconductor Silicon Wafer Material Technology (English Version)

Standard No.

T/SHDSGY 135-2023

Language

Chinese, Available in English version

Release Date

2023

Published By

Group Standards of the People's Republic of China

Latest

T/SHDSGY 135-2023

Scope

This document specifies terms and definitions, silicon wafer technical requirements, semiconductor silicon wafer manufacturing process, test methods, inspection specification marks, packaging, transportation, storage and quality certificates. This document applies to new energy semiconductor silicon wafer material technology.

T/SHDSGY 135-2023 history

• 2023 T/SHDSGY 135-2023 New Energy Semiconductor Silicon Wafer Material Technology
• 2022 T/SHDSGY 135-2022 Technical specification for aluminum alloy super flat plate