DIN 50446:1995
Testing of materials for semiconductor technology - Determination of defect types and defect densities of silicon epitaxial layers

Standard No.

DIN 50446:1995

Release Date

1995

Published By

German Institute for Standardization

Status

Withdraw

Latest

DIN 50446:1995

Scope

The document specifies methods for determination of defect types, especially crystal defects, and defect densities of silicon epitaxial layers with a thickness of 0,5 ?#,,#

DIN 50446:1995 history

• 1995 DIN 50446:1995 Testing of materials for semiconductor technology - Determination of defect types and defect densities of silicon epitaxial layers