DANSK DS/EN 62047-11:2013
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems

Standard No.

DANSK DS/EN 62047-11:2013

Release Date

2013

Published By

SCC

Latest

DANSK DS/EN 62047-11:2013

DANSK DS/EN 62047-11:2013 history

• 2013 DANSK DS/EN 62047-11:2013 Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems