T/ZZB 0639-2018
Alumium doped zinc oxide magnetron sputtering targets (English Version)
- Standard No.
- T/ZZB 0639-2018
- Language
- Chinese, Available in English version
- Release Date
- 2018
- Published By
- Group Standards of the People's Republic of China
- Latest
- T/ZZB 0639-2018
- Scope
- This standard specifies the terms and definitions, basic requirements, technical requirements, test methods, inspection rules, marking, packaging, transportation and storage, quality commitment, etc. of zinc oxide aluminum magnetron sputtering targets. This standard is applicable to zinc oxide aluminum magnetron sputtering targets produced by powder metallurgy and used for magnetron sputtering to deposit functional dielectric layers of energy-saving Low-E glass and transparent electrode layers of thin film solar cells.
T/ZZB 0639-2018 history
- 2018 T/ZZB 0639-2018 Alumium doped zinc oxide magnetron sputtering targets
