DB35/T 1248-2012
Determination of impurity content in germane gas for electronics industry - Gas chromatography (English Version)
- Standard No.
- DB35/T 1248-2012
- Language
- Chinese, Available in English version
- Release Date
- 2012
- Published By
- Fujian Provincial Standard of the People's Republic of China
- Latest
- DB35/T 1248-2012
- Scope
- This standard specifies a method for determining the impurity content in germane gas used in the electronics industry by gas chromatography. This standard is applicable to the determination of hydrogen, oxygen (argon), nitrogen, methane, carbon monoxide, and carbon dioxide content in germane gas used in the electronics industry. The detection limits of each impurity component: hydrogen: 0.02 μmol/mol, oxygen (argon): 0.01 μmol/mol, nitrogen: 0.01 μmol/mol, methane: 0.005 μmol/mol, carbon monoxide: 0.02 μmol/mol, carbon dioxide: 0.005 μmol /mol; linear range of detection of each impurity component: hydrogen, oxygen (argon), nitrogen ≤ 1000 μmol/mol, methane, carbon monoxide, carbon dioxide ≤ 2000 μmol/mol.
DB35/T 1248-2012 history
- 2012 DB35/T 1248-2012 Determination of impurity content in germane gas for electronics industry - Gas chromatography
