ASTM F1844-97(2016)
Standard Practice for Measuring Sheet Resistance of Thin Film Conductors For Flat Panel Display Manufacturing Using a Noncontact Eddy Current Gage

Standard No.

ASTM F1844-97(2016)

Release Date

2016

Published By

American Society for Testing and Materials (ASTM)

Latest

ASTM F1844-97(2016)

Scope

1.1 This practice describes methods for measuring the sheet electrical resistance of sputtered thin conductive films deposited on large insulating substrates (glass or plastic), used in making flat panel information displays. 1.2 This practice is intended to be used with Test Methods F673. This practice pertains to a “manual” measurement procedure in which an operator positions the measuring head on the test specimen and then personally activates the test apparatus. The resulting test data may be tabulated by the operator, or, alternatively, sent to a computer-based data logging system. Both Methods I and II of Test Methods F673 (paragraphs 3.1 through 3.3.3 of Test Methods F673) are applicable to this practice. 1.3 Sheet resistivity in the range 0.020 to 3000 Ω per square (sheet conductance in the range 3 by 10–4 to 50 mhos per square) may be measured by this practice. The sheet resistance is assumed to be uniform in the area being probed. NOTE 1—Typical manual test units, as described in this practice, measure and report in the units “mhos per square”; this is the inverse of “ohms per square.” 1.4 This practice is applicable to flat surfaces only. 1.5 This practice is non-destructive. It may be used on production panels to help assure production uniformity. 1.6 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard. 1.7 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

ASTM F1844-97(2016) Referenced Document

• ASTM F673 Standard Test Methods for Measuring Resistivity of Semiconductor Slices or Sheet Resistance of Semiconductor Films with a Noncontact Eddy-Current Gage

ASTM F1844-97(2016) history

• 2016 ASTM F1844-97(2016) Standard Practice for Measuring Sheet Resistance of Thin Film Conductors For Flat Panel Display Manufacturing Using a Noncontact Eddy Current Gage
• 1997 ASTM F1844-97(2008) Standard Practice for Measuring Sheet Resistance of Thin Film Conductors For Flat Panel Display Manufacturing Using a Noncontact Eddy Current Gage
• 1997 ASTM F1844-97(2002) Standard Practice for Measuring Sheet Resistance of Thin Film Conductors For Flat Panel Display Manufacturing Using a Noncontact Eddy Current Gage
• 1997 ASTM F1844-97 Standard Practice for Measuring Sheet Resistance of Thin Film Conductors For Flat Panel Display Manufacturing Using a Noncontact Eddy Current Gage