DIN 50438-1:1995
Testing of materials for semiconductor technology - Determination of impurity content in silicon by infrared absorption - Part 1: Oxygen
- Standard No.
- DIN 50438-1:1995
- Release Date
- 1995
- Published By
- German Institute for Standardization
- Status
- Latest
- DIN 50438-1:1995
- Scope
- This document specifies two methods for the non-destructive determination of the oxygen content in silicon by infrared absorption.
DIN 50438-1:1995 history
- 1995 DIN 50438-1:1995 Testing of materials for semiconductor technology - Determination of impurity content in silicon by infrared absorption - Part 1: Oxygen
