T/CHBAS 34-2023
Mixed gas for integrated circuits 10% ammonia/helium (English Version)

Standard No.

T/CHBAS 34-2023

Language

Chinese, Available in English version

Release Date

2023

Published By

Group Standards of the People's Republic of China

Latest

T/CHBAS 34-2023

Scope

This document specifies the technical requirements, test methods, inspection rules, marking, labeling, packaging, transportation, storage and safety requirements for 10% ammonia/helium mixed gas for integrated circuits. This document is applicable to 10% ammonia/helium mixed gas for integrated circuits (hereinafter referred to as 10% ammonia/helium). Ammonia-helium mixed gases with other component ratios can be implemented accordingly.

T/CHBAS 34-2023 history

• 2023 T/CHBAS 34-2023 Mixed gas for integrated circuits 10% ammonia/helium