KS L ISO 21859-2023
Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment

Standard No.

KS L ISO 21859-2023

Release Date

2023

Published By

KR-KS

Latest

KS L ISO 21859-2023

KS L ISO 21859-2023 history

• 2023 KS L ISO 21859-2023 Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment