DIN IEC 62047-11 E:2010
Draft Document - Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for linear thermal expansion coefficients of MEMS materials (IEC 47F/49/CD:2010)

Standard No.

DIN IEC 62047-11 E:2010

Release Date

2010

Published By

SCC

Latest

DIN IEC 62047-11 E:2010

DIN IEC 62047-11 E:2010 history

• 2010 DIN IEC 62047-11 E:2010 Draft Document - Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for linear thermal expansion coefficients of MEMS materials (IEC 47F/49/CD:2010)