SJ/T 11853-2022
Positive pressure suspended zone melting single crystal silicon furnace (English Version)

Standard No.

SJ/T 11853-2022

Language

Chinese, Available in English version

Release Date

2022

Published By

Professional Standard - Electron

Latest

SJ/T 11853-2022

SJ/T 11853-2022 history

• 2022 SJ/T 11853-2022 Positive pressure suspended zone melting single crystal silicon furnace