T/CMES 32001-2023
Process specification for preparing tungsten-rhenium alloy indium-tin oxide composite thin film thermocouple temperature sensor by magnetron sputtering method (English Version)

Standard No.

T/CMES 32001-2023

Language

Chinese, Available in English version

Release Date

2023

Published By

Group Standards of the People's Republic of China

Latest

T/CMES 32001-2023

Scope

This document gives the process specifications and related regulations for preparing tungsten-rhenium alloy indium-tin oxide composite thin film thermocouple temperature sensors by magnetron sputtering.

T/CMES 32001-2023 history

• 2023 T/CMES 32001-2023 Process specification for preparing tungsten-rhenium alloy indium-tin oxide composite thin film thermocouple temperature sensor by magnetron sputtering method