GB/T 34894-2017
Micro-electromechanical system technology—Measuring method for strain gradient measurements of MEMS microstructures using an optical interferometer (English Version)

Standard No.

GB/T 34894-2017

Language

Chinese, Available in English version

Release Date

2017

Published By

中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Latest

GB/T 34894-2017

GB/T 34894-2017 history

• 2017 GB/T 34894-2017 Micro-electromechanical system technology—Measuring method for strain gradient measurements of MEMS microstructures using an optical interferometer