T/ICMTIA TG0011-2022
High-purity aluminum and aluminum alloy sputtering targets for integrated circuits (English Version)

Standard No.

T/ICMTIA TG0011-2022

Language

Chinese, Available in English version

Release Date

2022

Published By

Group Standards of the People's Republic of China

Latest

T/ICMTIA TG0011-2022

Scope

This document specifies the technical requirements, detection methods, packaging and transportation and safety requirements for high-purity aluminum and aluminum alloy sputtering targets for integrated circuits. This document applies to high-purity aluminum and aluminum alloy targets for integrated circuit manufacturing.

T/ICMTIA TG0011-2022 history

• 2022 T/ICMTIA TG0011-2022 High-purity aluminum and aluminum alloy sputtering targets for integrated circuits