T/ZGM 014-2023
Technical specifications of degasification membrane products certification for ultrapure water in the semiconductor industry (English Version)

Standard No.

T/ZGM 014-2023

Language

Chinese, Available in English version

Release Date

2023

Published By

Group Standards of the People's Republic of China

Latest

T/ZGM 014-2023

Scope

This standard specifies the technical requirements and test methods for the certification of degassing membrane components for ultrapure water preparation in the semiconductor industry. This standard applies to degassing membrane components for ultrapure water preparation in the semiconductor industry. Standardizes the size, performance, material, cleanliness requirements and test methods of degassing membrane products.

T/ZGM 014-2023 history

• 2023 T/ZGM 014-2023 Technical specifications of degasification membrane products certification for ultrapure water in the semiconductor industry
• 2022 T/ZGM 014-2022 Technical Specifications for Energy Conservation Certification for Hollow Fiber Membrane Bioreactor Cassette