BH GSO IEC 62047-6:2016
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials

Standard No.

BH GSO IEC 62047-6:2016

Published By

GSO

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BH GSO IEC 62047-6:2016

BH GSO IEC 62047-6:2016 history

• 1970 BH GSO IEC 62047-6:2016 Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials