Based on the material performance characteristics of diamond single crystal wafers and combined with the current research level of domestic diamond crystal quality inspection technology, this standard stipulates the testing principle, measurement accuracy guarantee, measurement steps, etc. of the X-ray double crystal rocking curve of diamond single crystal wafers. . The subject chapters of this standard are divided into 11 chapters. The main contents include: scope, normative reference documents, terms and definitions, test principles, test instruments and calibration, test samples, interference factors, test environment, test procedures, precision, and test reports. and appendices.
T/IAWBS 017-2022 history
2022T/IAWBS 017-2022 Test method for full width at half maximum of double crystal X-rayrocking curve of diamond single crystal substrate