T/ICMTIA ESG0013-2022
Mixed gas for integrated circuits 3.5% argon/10ppm xenon/neon (English Version)

Standard No.

T/ICMTIA ESG0013-2022

Language

Chinese, Available in English version

Release Date

2022

Published By

Group Standards of the People's Republic of China

Latest

T/ICMTIA ESG0013-2022

Scope

This document specifies the technical requirements, test methods, marking, packaging, transportation and storage requirements for 3.5% argon/10ppm xenon/neon mixture for integrated circuits. This document is applicable to 3.5% argon/10ppm xenon/neon mixture for integrated circuits. Argon, xenon and neon mixtures with other component proportions can be implemented as a reference.

T/ICMTIA ESG0013-2022 history

• 2022 T/ICMTIA ESG0013-2022 Mixed gas for integrated circuits 3.5% argon/10ppm xenon/neon