OS GSO ISO 12406:2013
Surface chemical analysis -- Secondary-ion mass spectrometry -- Method for depth profiling of arsenic in silicon

Standard No.

OS GSO ISO 12406:2013

Published By

GSO

Latest

OS GSO ISO 12406:2013

OS GSO ISO 12406:2013 history

• 1970 OS GSO ISO 12406:2013 Surface chemical analysis -- Secondary-ion mass spectrometry -- Method for depth profiling of arsenic in silicon