DIN 50454-3:1994
Testing of materials for semiconductor technology - Determination of the dislocation etch pits density in monocrystals of III-V-compound semiconductors - Part 3: Gallium phosphide
- Standard No.
- DIN 50454-3:1994
- Release Date
- 1994
- Published By
- German Institute for Standardization
- Status
- Latest
- DIN 50454-3:1994
- Scope
- The document specifies a test method for determination of the dislocation etch pits densities
100000 cm<(hoch)-2> in monocrystals of gallium phosphide. The method is independent on the electrical resistivity and the conductivity type of the material.
DIN 50454-3:1994 history
- 1994 DIN 50454-3:1994 Testing of materials for semiconductor technology - Determination of the dislocation etch pits density in monocrystals of III-V-compound semiconductors - Part 3: Gallium phosphide
