T/CAMS 179-2023
High speed and high precision spindle for silicon slicer (English Version)

Standard No.

T/CAMS 179-2023

Language

Chinese, Available in English version

Release Date

2023

Published By

Group Standards of the People's Republic of China

Latest

T/CAMS 179-2023

Scope

This document specifies the terms and definitions, classification, appearance, installation and labeling, technical requirements, test methods, geometric accuracy inspection, inspection rules, marking, packaging and storage of high-speed and high-precision spindles for silicon wafer slicing machines.

T/CAMS 179-2023 history

• 2023 T/CAMS 179-2023 High speed and high precision spindle for silicon slicer