NF E05-031-603*NF EN ISO 25178-603:2013
Geometrical product specifications (GPS) - Surface texture : areal - Part 603 : nominal characteristics of non-contact (phase shifting interferometric microscopy) instruments

Standard No.

NF E05-031-603*NF EN ISO 25178-603:2013

Release Date

2013

Published By

Association Francaise de Normalisation

Latest

NF E05-031-603*NF EN ISO 25178-603:2013

NF E05-031-603*NF EN ISO 25178-603:2013 history

• 2013 NF E05-031-603*NF EN ISO 25178-603:2013 Geometrical product specifications (GPS) - Surface texture : areal - Part 603 : nominal characteristics of non-contact (phase shifting interferometric microscopy) instruments