SJ/T 11763-2020
Specification for human-machine interface for semiconductor manufacturing equipment (English Version)

Standard No.

SJ/T 11763-2020

Language

Chinese, Available in English version

Release Date

2020

Published By

工业和信息化部

Latest

SJ/T 11763-2020

SJ/T 11763-2020 history

• 2020 SJ/T 11763-2020 Specification for human-machine interface for semiconductor manufacturing equipment