VDI/VDE 2655 Blatt 1.1-2005 Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement
2008VDI/VDE 2655 Blatt 1.1-2008 Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement
2005VDI/VDE 2655 Blatt 1.1-2005 Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement