This document specifies the fiducial marks and dimensions of 8-inch silicon carbide substrates. This document applies to silicon carbide cutting discs, grinding discs and polishing discs. Note: Silicon carbide substrates are mainly used to make epitaxial substrates for power electronic devices.
T/CASAS 025-2023 history
2023T/CASAS 025-2023 8-inch silicon carbide wafer reference marking and dimensions