This document specifies the terms and definitions, technical requirements, test methods, inspection specifications, marking, packaging, transportation, storage, etc. of large-size annular silicon germanium targets. The technical requirements include basic requirements, materials, chemical composition, physical properties, physical specifications, surface quality, internal defects, overlap ratio, flatness and backplane material. Test methods include chemical composition arbitration analysis methods, physical performance inspection methods, and measurement methods of physical specifications, surface quality, internal defects, and overlap ratio. Inspection rules include inspection and acceptance, batch grouping, inspection items, arbitration sampling and sample preparation, and determination of inspection results.