T/CEMIA 023-2021
Quartz crucible forsemiconductor monosilicon growth (English Version)

Standard No.
T/CEMIA 023-2021
Language
Chinese, Available in English version
Release Date
2021
Published By
Group Standards of the People's Republic of China
Latest
T/CEMIA 023-2021
Scope
This document defines the terms and definitions of quartz crucibles for semiconductor single crystal silicon growth, and stipulates dimensional deviations, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage. This document is applicable to quartz crucibles for semiconductor single crystal silicon growth using high-purity quartz sand (composition: silicon dioxide) as raw material, produced by arc melting method.

T/CEMIA 023-2021 history




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