This document specifies the terms and definitions, technical requirements, test methods, inspection specifications, marking, packaging, transportation, storage, etc. of rotating silicon targets. The technical requirements include basic requirements, materials, chemical composition, physical properties, physical specifications, appearance quality, internal defects, rotating silicon target crystal form, overlap rate, surface quality and liner materials. Test methods include chemical composition arbitration analysis methods, physical performance inspection methods, and measurement methods of physical specifications, appearance quality, internal defects, crystal morphology, grain size, overlap ratio, roundness and coaxiality. Inspection rules include inspection and acceptance, batch grouping, inspection items, arbitration sampling and sample preparation, and determination of inspection results.