T/GVS 003-2021
Ion source for vacuum surface treatment process (English Version)
- Standard No.
- T/GVS 003-2021
- Language
- Chinese, Available in English version
- Release Date
- 2021
- Published By
- Group Standards of the People's Republic of China
- Latest
- T/GVS 003-2021
- Scope
- Specifies the terms and definitions, classification, usage conditions, technical requirements, test methods, inspection rules, marking, packaging, transportation and storage of ion sources commonly used in vacuum surface treatment processes. It is suitable for common ion sources (hereinafter referred to as ion sources) used in surface treatment processes in vacuum environments.
T/GVS 003-2021 history
- 2021 T/GVS 003-2021 Ion source for vacuum surface treatment process
