BS IEC 62047-34:2019
Semiconductor devices. Micro-electromechanical devices - Test methods for MEMS piezoresistive pressure-sensitive device on wafer

Standard No.
BS IEC 62047-34:2019
Release Date
2019
Published By
British Standards Institution (BSI)
Latest
BS IEC 62047-34:2019
Scope
What is BS IEC 62047-34- MEMS piezoresistive pressure-sensitive devices about?  BS IEC 62047-34 is the thirty-fourth part of the Semiconductor devices and microelectromechanical devices that specifies the test methods and test procedures for MEMS piezoresistive pressure-sensitive devices on wafers. By using BS IEC 62047-34 you can manufacture good quality microelectromechanical devices.    BS IEC 62047-34 describes test conditions and test methods of electric character, static   performances and thermal performances for MEMS pressure-sensitive devices. BS IEC 62047-34 applies to both open and closed loop piezoresistive MEMS pressure devices on the wafer.    Who is BS IEC 62047-34- MEMS piezoresistive pressure-sensitive devices for?   BS IEC 62047-34 Semiconductor devices are beneficial for:

BS IEC 62047-34:2019 history

  • 2019 BS IEC 62047-34:2019 Semiconductor devices. Micro-electromechanical devices - Test methods for MEMS piezoresistive pressure-sensitive device on wafer
Semiconductor devices. Micro-electromechanical devices - Test methods for MEMS piezoresistive pressure-sensitive device on wafer



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