T/ZZB 1373-2019
7N photoelectric class hyperpure ammonia (English Version)
- Standard No.
- T/ZZB 1373-2019
- Language
- Chinese, Available in English version
- Release Date
- 2019
- Published By
- Group Standards of the People's Republic of China
- Latest
- T/ZZB 1373-2019
- Scope
- This standard specifies the basic requirements, technical requirements, test methods, inspection rules, marking, packaging, transportation, storage and safety requirements and quality commitments of 7N photoelectronic grade ultrapure ammonia. The product ammonia specified in this standard is suitable for the semiconductor industry, chemical vapor deposition of silicon nitride and gallium nitride, and can also be used for ammonia used in production processes such as the nitridation of silicon or silicon oxide. Molecular formula: NH3. Relative molecular mass: 17.031 (according to 2016 international relative atomic weight).
T/ZZB 1373-2019 history
- 2019 T/ZZB 1373-2019 7N photoelectric class hyperpure ammonia
