ISO 25178-607:2019
Geometrical product specifications (GPS) — Surface texture: Areal — Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments

Standard No.

ISO 25178-607:2019

Release Date

2019

Published By

International Organization for Standardization (ISO)

Latest

ISO 25178-607:2019

Scope

This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.

ISO 25178-607:2019 history

• 2019 ISO 25178-607:2019 Geometrical product specifications (GPS) — Surface texture: Areal — Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments