ISO 22278:2020
Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

Standard No.

ISO 22278:2020

Release Date

2020

Published By

International Organization for Standardization (ISO)

Latest

ISO 22278:2020

Scope

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

ISO 22278:2020 history

• 2020 ISO 22278:2020 Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam