BS IEC 63068-3:2020
Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Test method for defects using photoluminescence
- Standard No.
- BS IEC 63068-3:2020
- Release Date
- 2020
- Published By
- British Standards Institution (BSI)
- Latest
- BS IEC 63068-3:2020
- Scope
- What is BS IEC 63068 ‑ 3 about?
BS IEC 63068 ‑ 3 is the international standard for semiconductors devices that specifies the test methods which helps in detecting the defects in silicon carbide homoepitaxial wafer.
BS IEC 63068 ‑ 3 is the third part of Semiconductor devices in multi-series standard.
BS IEC 63068 ‑ 3 provides definitions and guidance in the use of photoluminescence for detecting as-grown defects in commercially available 4H-SiC (Silicon Carbide) epitaxial wafers.
Who is BS IEC 63068 ‑ 3 for?
BS IEC 63068-3:2020 history
- 2020 BS IEC 63068-3:2020 Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Test method for defects using photoluminescence
