Yunnan Provincial Standard of the People's Republic of China
Latest
DB53/T 619-2014
Scope
This standard specifies the method summary, reagents and materials, instruments and devices, analysis steps, result calculation, precision, and test reports for the determination of the content of silicon tetrachloride and its subcomponents by gas chromatography. This standard is applicable to the determination of hydrogen chloride (HCl), dichlorosilane (SiH2Cl2), trichlorosilane (SiHCl3), and silicon tetrachloride (SiCl4).
DB53/T 619-2014 history
2014DB53/T 619-2014 Determination of Silicon Tetrachloride and Its Subcomponents by Gas Chromatography