This International Standard applies to the manufacture of synthetic quartz@ lithium niobate (LN)@ lithium tantalate (LT)@ lithium tetraborate (LBO)@ and lanthanum gallium silicate (LGS) single crystal wafers intended for use as substrates in the manufacture of surface acoustic wave (SAW) filters and resonators.
EN 62276:2013 history
2016EN 62276:2016 Single crystal wafers for surface acoustic wave (SAW) device applications - Specifications and measuring methods
2013EN 62276:2013 Single crystal wafers for surface acoustic wave (SAW) device applications - Specifications and measuring methods
2005EN 62276:2005 Medical electrical equipment – Safety of radiotherapy record and verify systems