ASTM F847-02

Standard No.

ASTM F847-02

Release Date

1970

Published By

/

Latest

ASTM F847-02

Scope

  Full Description Standard Test Methods for Measuring Crystallographic Orientation of Flats on Single Crystal Silicon Wafers by X-Ray Techniques (Withdrawn 2003)

ASTM F847-02 Referenced Document

• ASTM E122 Standard Practice for Calculating Sample Size to Estimate, With a Specified Tolerable Error, the Average for Characteristic of a Lot or Process*， 2000-10-10 Update
• ASTM E82 Standard Test Method for Determining the Orientation of a Metal Crystal*， 1991-04-21 Update
• ASTM F26 

ASTM F847-02 history

• 1970 ASTM F847-02
• 1994 ASTM F847-94(1999) Standard Test Methods for Measuring Crystallographic Orientation of Flats on Single Crystal Silicon Wafers by X-Ray Techniques