This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation and storage requirements for 2.7% ethylene/helium mixture. This document applies to 2.7% ethylene/helium mixed gas (hereinafter referred to as 2.7% ethylene/helium mixed gas) used in the electronics industry. Ethylene-helium mixed gases with other component proportions can be implemented as a reference.
T/CHBAS 24-2022 history
2022T/CHBAS 24-2022 Electronic industry mixed gas 2.7% ethylene/helium