UNE-EN 62047-21:2014
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (Endorsed by AENOR in November of 2014.)

Standard No.

UNE-EN 62047-21:2014

Release Date

2014

Published By

ES-UNE

Latest

UNE-EN 62047-21:2014

UNE-EN 62047-21:2014 history

• 2014 UNE-EN 62047-21:2014 Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (Endorsed by AENOR in November of 2014.)