T/ZS 0344-2022
Digital maskless laser direct imaging lithography machine (English Version)

Standard No.

T/ZS 0344-2022

Language

Chinese, Available in English version

Release Date

2022

Published By

Group Standards of the People's Republic of China

Latest

T/ZS 0344-2022

Scope

Preface 1 Scope 2 Normative references 3 Terms and definitions 4 Product classification 5 Working environment 6 Requirements 6.1 Appearance, size and weight 6.2 Main performance 6.3 Safety requirements 6.4 Noise 7 Test method 7.1 Test conditions 7.2 Appearance inspection and size and weight measurement 7.3 Performance Test 7.4 Safety inspection 7.5 Noise test 8 Inspection rules 8.1 Inspection classification 8.2 Factory inspection 8.3 Type inspection 8.4 Judgment rules 9 Marking, packaging, transportation, storage 9.1 Marking 9.2 Packaging 9.3 Transportation 9.4 Storage

T/ZS 0344-2022 history

• 2022 T/ZS 0344-2022 Digital maskless laser direct imaging lithography machine